Scanning Phase-Calculation Formula for Surface Profiling of Optical Flat using Fizeau Interferometer

Hwan Kim; Jurim Jeon; Juncheol Bae; Yangjin Kim

doi:10.1117/12.2673356

10 August 2023 Scanning Phase-Calculation Formula for Surface Profiling of Optical Flat using Fizeau Interferometer

Hwan Kim, Jurim Jeon, Juncheol Bae, Yangjin Kim

Proceedings Volume 12618, Optical Measurement Systems for Industrial Inspection XIII; 1261828 (2023) https://doi.org/10.1117/12.2673356
Event: SPIE Optical Metrology, 2023, Munich, Germany

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Hwan Kim, Jurim Jeon, Juncheol Bae, and Yangjin Kim "Scanning Phase-Calculation Formula for Surface Profiling of Optical Flat using Fizeau Interferometer", Proc. SPIE 12618, Optical Measurement Systems for Industrial Inspection XIII, 1261828 (10 August 2023); https://doi.org/10.1117/12.2673356

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