An infrared optical sensor for quantitative inline inspection of nanocoatings on plastic products

Benedikt Hauer; Adrian D. Dorfschmidt; Friederike Münch; Jens Scherer; Daniel Carl

doi:10.1117/12.2673229

15 August 2023 An infrared optical sensor for quantitative inline inspection of nanocoatings on plastic products

Benedikt Hauer, Adrian D. Dorfschmidt, Friederike Münch, Jens Scherer, Daniel Carl

Proceedings Volume 12618, Optical Measurement Systems for Industrial Inspection XIII; 126181L (2023) https://doi.org/10.1117/12.2673229
Event: SPIE Optical Metrology, 2023, Munich, Germany

Abstract

We developed a fast infrared sensor to quantify the film thickness of industrially applied SiO_x or AlO_x plasma coatings on non-flat polymer substrates at production speed. Its underlying physical principle is comparable to infrared reflection absorption spectroscopy (IRRAS) at selected, fixed wavelengths. The coating materials can be measured via their specific phononic absorption bands in the infrared spectral range. In this paper, we demonstrate the functionality of our sensor on actual packaging materials to showcase its aptitude for industrial inline inspection. Furthermore, we discuss a possible extension of our sensor to enable spectroscopic measurements using a tunable Fabry-Pérot filter.

Conference Presentation

Citation Download Citation

Benedikt Hauer, Adrian D. Dorfschmidt, Friederike Münch, Jens Scherer, and Daniel Carl "An infrared optical sensor for quantitative inline inspection of nanocoatings on plastic products", Proc. SPIE 12618, Optical Measurement Systems for Industrial Inspection XIII, 126181L (15 August 2023); https://doi.org/10.1117/12.2673229

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