Measurement of optical constants of nano-film based on ellipsometric data at visible wavelength

Chong Yue; YueQing Ding; Lei Tao; Jin Zhou; Xin Chen

doi:10.1117/12.2666758

4 April 2023 Measurement of optical constants of nano-film based on ellipsometric data at visible wavelength

Chong Yue, YueQing Ding, Lei Tao, Jin Zhou, Xin Chen

Proceedings Volume 12617, Ninth Symposium on Novel Photoelectronic Detection Technology and Applications; 126176Y (2023) https://doi.org/10.1117/12.2666758
Event: 9th Symposium on Novel Photoelectronic Detection Technology and Applications (NDTA 2022), 2022, Hefei, China

Abstract

In order to obtain high precision optical constants at in the ellipsometry measurement process, an optimization algorithm for solving the complex refractive index of nano films at visible wavelength is proposed. To improve the convergence rate and the ability to escape from local optimum of original algorithm, an Improved Particle Swarm Optimization (IPSO) has been proposed to deal with and analyze the ellipsometry parameters, this method combines the evolutionary algebraic attenuation factor with the adaptive genetic algorithm. The algorithm is used to calculate the film parameters of silicon dioxide nano film thickness standard template with standard value of 100.4±0.3 nm in this paper. The results show that the relative error of the calculation results of the optical constants refractive index error is less than 0.1 at visible wavelength. At the same time, it is verified by experiments that the IPSO algorithm model can effectively optimize the number of iterations and has the advantages of fast convergence speed and high measurement efficiency.

Citation Download Citation

Chong Yue, YueQing Ding, Lei Tao, Jin Zhou, and Xin Chen "Measurement of optical constants of nano-film based on ellipsometric data at visible wavelength", Proc. SPIE 12617, Ninth Symposium on Novel Photoelectronic Detection Technology and Applications, 126176Y (4 April 2023); https://doi.org/10.1117/12.2666758

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KEYWORDS

Particle swarm optimization

Ellipsometry

Refractive index

Particles

Evolutionary algorithms

Thin films

Mathematical optimization

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