Paper
4 April 2023 Research on integrated and manufacturing technology for high efficiency flexible precision grinding of optical elements
Zhi Gang Zhang, Xilong Jang, Qihui Tu, Li Kang, Liqiang Du, Yanxiong Meng
Author Affiliations +
Proceedings Volume 12617, Ninth Symposium on Novel Photoelectronic Detection Technology and Applications; 126174Y (2023) https://doi.org/10.1117/12.2666417
Event: 9th Symposium on Novel Photoelectronic Detection Technology and Applications (NDTA 2022), 2022, Hefei, China
Abstract
In this paper, based on the analysis of the machining method and equipment status of SIC material optical elements, the special grinding method and grinding tool for belt grinding are explored, by means of a set of mechanism with driving, contacting and tensioning functions, it can be applied to the precision machining technology of flexible grinding on optical elements. A robotic belt flexible grinding system is established by using this technology. The precision grinding experiments of SIC specimens are carried out, and the micro-morphology and sub-surface damage of the specimens are analyzed, a whole set of process method is optimized to meet the needs of material processing. To optimize the processing of flexible machining paths through off-line programming and 3D simulation of typical optical automation, self-planning an optimal processing path from the starting state to the target state.
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhi Gang Zhang, Xilong Jang, Qihui Tu, Li Kang, Liqiang Du, and Yanxiong Meng "Research on integrated and manufacturing technology for high efficiency flexible precision grinding of optical elements", Proc. SPIE 12617, Ninth Symposium on Novel Photoelectronic Detection Technology and Applications, 126174Y (4 April 2023); https://doi.org/10.1117/12.2666417
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KEYWORDS
Optical components

Surface finishing

Abrasives

Optical surfaces

3D modeling

Silicon carbide

Diamond

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