Oxygen vacancies modulated the photodetector performance in ZnGa2O4 thin films by rapid thermal annealing

Kang Ling; Wanli Zhang; Xingzhao Liu

doi:10.1117/12.2662806

4 April 2023 Oxygen vacancies modulated the photodetector performance in ZnGa₂O₄ thin films by rapid thermal annealing

Kang Ling, Wanli Zhang, Xingzhao Liu

Proceedings Volume 12617, Ninth Symposium on Novel Photoelectronic Detection Technology and Applications; 1261702 (2023) https://doi.org/10.1117/12.2662806
Event: 9th Symposium on Novel Photoelectronic Detection Technology and Applications (NDTA 2022), 2022, Hefei, China

Abstract

ZnGa2O4 is a emerging candidate material for solar-blind UV photodetector. However, the systematic regulation of performance based on the ZnGa2O4 photodetectors by oxygen vacancies has not been reported. Herein, ZnGa2O4 thin films were deposited on sapphire substrate by employing magnetron sputtering, and the performance of the ZnGa2O4 photodetectors were prefected by modulating the defect concentration through rapid thermal annealing under gas atmosphere. The results show that the ZnGa2O4 photodetector annealed under nitrogen atmosphere exhibit a series of optimal performance parameters. This can be explained by the increased oxygen vacancy ratios of the ZnGa2O4 thin films after N2 annealing and the filling of crystal defects. In view of the common oxygen vacancy defects in oxides, our research provides a basis for prefecting the performance of oxide photodetectors.

Citation Download Citation

Kang Ling, Wanli Zhang, and Xingzhao Liu "Oxygen vacancies modulated the photodetector performance in ZnGa₂O₄ thin films by rapid thermal annealing", Proc. SPIE 12617, Ninth Symposium on Novel Photoelectronic Detection Technology and Applications, 1261702 (4 April 2023); https://doi.org/10.1117/12.2662806

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