Soft x-ray spectroscopy in the lab with an ellipsoidal mirror and a wavefront corrected reflection zone plate

Jürgen Probst; Heike Löchel; Thomas Krist; Christoph Braig; Christian Seifert

doi:10.1117/12.2663780

7 June 2023 Soft x-ray spectroscopy in the lab with an ellipsoidal mirror and a wavefront corrected reflection zone plate

Jürgen Probst, Heike Löchel, Thomas Krist, Christoph Braig, Christian Seifert

Author Affiliations +

Proceedings Volume 12576, EUV and X-ray Optics: Synergy between Laboratory and Space VIII; 125760C (2023) https://doi.org/10.1117/12.2663780
Event: SPIE Optics + Optoelectronics, 2023, Prague, Czech Republic

Abstract

We present first experimental results on wavelength-dispersive soft X-ray spectroscopy of TiO₂ in the vicinity of the Ti Lσ fluorescence line with a central energy of about 452.2 eV, demonstrating the functionality of a newly developed, laboratory-scaled setup. In our instrument, the micron-sized photon emission from an electronexcited source is collected efficiently by a rotationally symmetric, ellipsoidal mirror and subsequently dispersed by a reflection zone plate with inscribed diffractive wavefront correction, to compensate for figure and alignment errors of the ellipsoid to some degree. The measured data, recorded with a CCD camera in one meter from the source, show clearly separated peaks from different Ti L (398.3 eV and 452.2 eV) contributions and O Kα emission (523.1 eV) with an energy resolving power around 38 and a signal-to-noise ratio between 4.4 and 10.7.

Conference Presentation

Citation Download Citation

Jürgen Probst, Heike Löchel, Thomas Krist, Christoph Braig, and Christian Seifert "Soft x-ray spectroscopy in the lab with an ellipsoidal mirror and a wavefront corrected reflection zone plate", Proc. SPIE 12576, EUV and X-ray Optics: Synergy between Laboratory and Space VIII, 125760C (7 June 2023); https://doi.org/10.1117/12.2663780

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