Fin depopulation, thinner and taller fins, and the step towards Nanosheet technologies has been helping in maintaining the rhythm of the semiconductor technology roadmap. Nevertheless, further area scaling causes a drastic reduction in active width as well as a challenging routability. On this regard, the Complementary-FET is a strong contender as device for next generation technologies. The stack of p- on n-FETs offers several opportunities for device scaling and optimization. However, it also poses several challenges that need to be carefully analyzed in a design-technology cooptimization framework.
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