Synergy between quantum computing and semiconductor technology

Rogier Verberk; David J. Michalak; Richard Versluis; Henk Polinder; Nodar Samkharadze; Sergey Amitonov; Amir Sammak; Larysa Tryputen; Delphine Brousse; Rabah Hanfoug

doi:10.1117/12.2639994

1 November 2022 Synergy between quantum computing and semiconductor technology

Rogier Verberk, David J. Michalak, Richard Versluis, Henk Polinder, Nodar Samkharadze, Sergey Amitonov, Amir Sammak, Larysa Tryputen, Delphine Brousse, Rabah Hanfoug

Author Affiliations +

Proceedings Volume 12472, 37th European Mask and Lithography Conference; 1247207 (2022) https://doi.org/10.1117/12.2639994
Event: 37th European Mask and Lithography Conference, 2022, Leuven, Belgium

Abstract

As part of the National Agenda for Quantum Technology, QuTech (TU Delft and TNO) has agreed to make quantum technology accessible to society and industry via its full-stack prototype: Quantum Inspire. This system includes two different types of programmable quantum chips: circuits made from superconducting materials (transmons), and circuits made from silicon-based materials that localize and control single-electron spins (spin qubits). Silicon-based spin qubits are a natural match to the semiconductor manufacturing community, and several industrial fabrication facilities are already producing spin-qubit chips. Here, we discuss our latest results in spin-qubit technology and highlight where the semiconducting community has opportunities to drive the field forward. Specifically, developments in the following areas would enable fabrication of more powerful spin-qubit based quantum computing devices: circuit design rules implementing cryogenic device physics models, high-fidelity gate patterning of low resistance or superconducting metals, gate-oxide defect mitigation in relevant materials, silicon-germanium heterostructure optimization, and accurate magnetic field generation from on-chip micromagnets.

Citation Download Citation

Rogier Verberk, David J. Michalak, Richard Versluis, Henk Polinder, Nodar Samkharadze, Sergey Amitonov, Amir Sammak, Larysa Tryputen, Delphine Brousse, and Rabah Hanfoug "Synergy between quantum computing and semiconductor technology", Proc. SPIE 12472, 37th European Mask and Lithography Conference, 1247207 (1 November 2022); https://doi.org/10.1117/12.2639994

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available