Analysis of SEMI EDA standards for semiconductor equipment data acquisition

Fan Li; Yunhua Qiao; Hongjun Zhao; Shan He; Xiaoxiao Chen

doi:10.1117/12.2659134

28 October 2022 Analysis of SEMI EDA standards for semiconductor equipment data acquisition

Fan Li, Yunhua Qiao, Hongjun Zhao, Shan He, Xiaoxiao Chen

Proceedings Volume 12453, Third International Conference on Computer Communication and Network Security (CCNS 2022); 1245304 (2022) https://doi.org/10.1117/12.2659134
Event: Third International Conference on Computer Communication and Network Security (CCNS 2022), 2022, Hohhot, China

Abstract

Based on the semiconductor equipment data acquisition standard, this paper analyzes the communication method between the fabrication client applications and the equipments. The common equipment model and the method of self-description of equipment nodes based on metadata are firstly studied in this paper, and then we research the security authentication and authorization mechanism between equipments and fabrication client applications. A method for client acquisiting semiconductor equipments data timely and flexible is given by SEMI EDA, which improves the ability of fabrication client applications to collect equipment data.

Citation Download Citation

Fan Li, Yunhua Qiao, Hongjun Zhao, Shan He, and Xiaoxiao Chen "Analysis of SEMI EDA standards for semiconductor equipment data acquisition", Proc. SPIE 12453, Third International Conference on Computer Communication and Network Security (CCNS 2022), 1245304 (28 October 2022); https://doi.org/10.1117/12.2659134

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