Hybrid integrated RGB light engine for AR in silicon nitride PIC technology

Raimond N. Frentrop; Douwe H. Geuzebroek; Edwin J. Klein; Floris H. Falke; Ronald Dekker

doi:10.1117/12.2649937

16 March 2023 Hybrid integrated RGB light engine for AR in silicon nitride PIC technology

Raimond N. Frentrop, Douwe H. Geuzebroek, Edwin J. Klein, Floris H. Falke, Ronald Dekker

Proceedings Volume 12449, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) IV; 124490F (2023) https://doi.org/10.1117/12.2649937
Event: SPIE AR | VR | MR, 2023, San Francisco, California, United States

Abstract

We demonstrate a silicon-nitride Photonic Integrated Circuit based RGB light engine. The engine uses a flip chip laser diode assembly process for hybrid integration of the Red, Green and Blue laser diodes, as well as power monitoring detectors. The lasers are flip chip soldered in etched recesses in the silicon nitride PIC for optimal coupling. Small formfactor 5x10x1 mm³ (width x length x thickness) devices have been realized. Output powers of ~1mW are measured and depend on the laser diodes used. Typical coupling losses are 1.5 dB for the actively aligned implementations. The described assembly approach facilitates wafer level laser diode integration and wafer level hermetic packaging for scalable volume manufacturing.

Conference Presentation

Citation Download Citation

Raimond N. Frentrop, Douwe H. Geuzebroek, Edwin J. Klein, Floris H. Falke, and Ronald Dekker "Hybrid integrated RGB light engine for AR in silicon nitride PIC technology", Proc. SPIE 12449, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) IV, 124490F (16 March 2023); https://doi.org/10.1117/12.2649937

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