UV-replicated microlenses for quantum devices

Frédéric Zanella; Christian Schneider; Luka Ciric; Guillaume Basset

doi:10.1117/12.2648224

15 March 2023 UV-replicated microlenses for quantum devices

Frédéric Zanella, Christian Schneider, Luka Ciric, Guillaume Basset

Proceedings Volume 12430, Quantum Sensing and Nano Electronics and Photonics XIX; 124300C (2023) https://doi.org/10.1117/12.2648224
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

Microlenses replicated on front-illuminated single-photon avalanche diodes (SPAD) or back-illuminated CMOS image sensor are found to be stable to temperature variations, exposure to humidity, mechanical shocks and vibrations, as well as irradiation by gamma rays (for space applications). They highly improve the effective fill-factor, on front-illuminated SPAD-based image sensors, and the parasitic light sensitivity on a back-illuminated CMOS image sensor. Their broad transmission spectrum from NUV to NIR, combined with the wide geometrical space available to fabricate microlenses on various active substrates (wafer or die down to 2×2 mm²), make them suitable to a wide range of quantum photonics applications.

Conference Presentation

Citation Download Citation

Frédéric Zanella, Christian Schneider, Luka Ciric, and Guillaume Basset "UV-replicated microlenses for quantum devices", Proc. SPIE 12430, Quantum Sensing and Nano Electronics and Photonics XIX, 124300C (15 March 2023); https://doi.org/10.1117/12.2648224

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