Ultra-wide bandgap Ga2O3 technologies: benefits of heterogenous integration

Abhishek Mishra; Arpit Nandi; Indraneel Sanyal; Zeina Abdallah; James W. Pomeroy; Martin Kuball

doi:10.1117/12.2662307

16 March 2023 Ultrawide bandgap Ga₂O₃ technologies: benefits of heterogenous integration

Abhishek Mishra, Arpit Nandi, Indraneel Sanyal, Zeina Abdallah, James W. Pomeroy, Martin Kuball

Proceedings Volume 12422, Oxide-based Materials and Devices XIV; 1242206 (2023) https://doi.org/10.1117/12.2662307
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

We discuss the potential of heterogenous integration of Ga₂O₃ with diamond for enabling energy-efficient kV-class power devices. The integration alleviates Ga₂O₃material drawbacks such as its low thermal conductivity and inefficient hole conductivity. The benefits of heterogeneous integration are demonstrated through electrical and thermal simulations of a Ga₂O₃-Al₂O₃-diamond superjunction based Schottky barrier diode. The simulation studies show that the novel device has potential to break the RON-breakdown voltage limit of Ga₂O₃, while showing relatively low rise in temperature compared to conventional devices. First steps for the actual materials integration are taken with the epitaxial growth of Ga₂O₃ on single crystal diamond substrates.

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Citation Download Citation

Abhishek Mishra, Arpit Nandi, Indraneel Sanyal, Zeina Abdallah, James W. Pomeroy, and Martin Kuball "Ultrawide bandgap Ga₂O₃ technologies: benefits of heterogenous integration", Proc. SPIE 12422, Oxide-based Materials and Devices XIV, 1242206 (16 March 2023); https://doi.org/10.1117/12.2662307

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