Stress control during ultrashort pulses laser for glass machining

Hyungsik Kim; Konstantin Mishchik; Woohyun Jung; Alexander Voronov; Jeongho Kim; Junghwa You; Seunghoon Jang; Sunggyu Park; Kyunghan Yoo; Jekil Ryu; Seongho Jeong; Cheollae Roh

doi:10.1117/12.2649949

17 March 2023 Stress control during ultrashort pulses laser for glass machining

Hyungsik Kim, Konstantin Mishchik, Woohyun Jung, Alexander Voronov, Jeongho Kim, Junghwa You, Seunghoon Jang, Sunggyu Park, Kyunghan Yoo, Jekil Ryu, Seongho Jeong, Cheollae Roh

Author Affiliations +

Proceedings Volume 12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII; 124080B (2023) https://doi.org/10.1117/12.2649949
Event: SPIE LASE, 2023, San Francisco, California, United States

Abstract

Requirements on glass manufacturing with exceptionally high mechanical strength triggered development of new laserbased processing methods. Localized modifications produced by ultrashort pulsed lasers are attractive but may lead to micro-crack generation in glass. Aiming to control stresses during volumetric material modifications, we have studied the effect of pulse duration experimentally. Bessel beam shapes with arbitrary conical angles have been generated using a programmable spatial light modulator (SLM), while stresses have been monitored using time-resolved optical transmission and cross polarized microscopy. Pulse duration variation influences mechanical stress in the laser glass interaction, and we found the optimized pulse duration exists in the laser glass machining by pump-probe microscopy.

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Hyungsik Kim, Konstantin Mishchik, Woohyun Jung, Alexander Voronov, Jeongho Kim, Junghwa You, Seunghoon Jang, Sunggyu Park, Kyunghan Yoo, Jekil Ryu, Seongho Jeong, and Cheollae Roh "Stress control during ultrashort pulses laser for glass machining", Proc. SPIE 12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII, 124080B (17 March 2023); https://doi.org/10.1117/12.2649949

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