High-efficiency thermo-optic phase shifter with segment heating electrodes based on high index contrast silicon oxide waveguide

Yujie Ye; Jie Li; JingYe Chen; Yaocheng Shi

doi:10.1117/12.2643811

20 December 2022 High-efficiency thermo-optic phase shifter with segment heating electrodes based on high index contrast silicon oxide waveguide

Yujie Ye, Jie Li, JingYe Chen, Yaocheng Shi

Author Affiliations +

Proceedings Volume 12314, Optoelectronic Devices and Integration XI; 1231408 (2022) https://doi.org/10.1117/12.2643811
Event: SPIE/COS Photonics Asia, 2022, Online Only

Abstract

The performance of traditional silicon oxide based phase shifter is limited by thermo-optic coefficient, making it difficult to achieve high-efficiency phase modulation. A relatively high index contrast (1.5%) SiO2 waveguide is utilized in our work. Thus, the cladding layer could be thinner since a higher confinement can be achieved. The heating efficiency is improved by reducing the thickness of the cladding layer together with the etched air trenches on both sides of the waveguide. The simulation results show that the heating efficiency of the overlay air trench is about 20% higher than the conventional one. Segment heating electrodes are also used to reduce the heating voltages. Mach-Zehnder interferometer (MZI) is fabricated to characterize the performance of the phase shifter, and the measured extinction ratio of MZI is larger than 34 dB with a heating power 69 mW/π.

Conference Presentation

Citation Download Citation

Yujie Ye, Jie Li, JingYe Chen, and Yaocheng Shi "High-efficiency thermo-optic phase shifter with segment heating electrodes based on high index contrast silicon oxide waveguide", Proc. SPIE 12314, Optoelectronic Devices and Integration XI, 1231408 (20 December 2022); https://doi.org/10.1117/12.2643811

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