Investigation on process stability of laser beam figuring for single nanometer ablation on fused silica

Emrah Uluz

doi:10.1117/12.2632797

15 July 2022 Investigation on process stability of laser beam figuring for single nanometer ablation on fused silica

Emrah Uluz

Proceedings Volume 12298, Ninth European Seminar on Precision Optics Manufacturing; 122980F (2022) https://doi.org/10.1117/12.2632797
Event: Ninth European Seminar on Precision Optics Manufacturing, 2022, Teisnach, Germany

Abstract

The processing of optical components surfaces is usually performed by grinding and polishing and is characterized by an increasingly fine gradation of the ablative processing. The aim of this step is to adjust shape errors, low- and mid-spatialfrequency errors caused by the previous grinding and polishing steps. These corrective polishing processes are associated with extreme accuracy requirements and thus with high equipment, process costs and long process times. A new and costeffective approach for correction polishing is the so-called Laser Beam Figuring (LBF). By controlling the pulse duration of a highly stable CO₂ laser beam source and thus the pulse energy of each individual laser pulse, the ablation depth can be locally adjusted in a targeted manner. In this way, site-selective ablation is possible to reproducibly correct the surface of a fused silica sample or to structure it with an ablation depth of ≤ 5 nm.

Citation Download Citation

Emrah Uluz "Investigation on process stability of laser beam figuring for single nanometer ablation on fused silica", Proc. SPIE 12298, Ninth European Seminar on Precision Optics Manufacturing, 122980F (15 July 2022); https://doi.org/10.1117/12.2632797

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