Scanning Shack-Hartmann sensor for wavefront measurements on freeform optics

Martin Fuerst; Nikolaus Berlakovich; Ernst Csencsics; Georg Schitter

doi:10.1117/12.2628328

3 October 2022 Scanning Shack-Hartmann sensor for wavefront measurements on freeform optics

Martin Fuerst, Nikolaus Berlakovich, Ernst Csencsics, Georg Schitter

Proceedings Volume 12221, Optical Manufacturing and Testing XIV; 122210T (2022) https://doi.org/10.1117/12.2628328
Event: SPIE Optical Engineering + Applications, 2022, San Diego, California, United States

Abstract

The Shack-Hartmann wavefront sensor has the potential to directly characterize the optical performance of a freeform part by measuring the wavefront transmitted or re ected by the part. However, the traditional Shack- Hartmann sensor's small dynamic range and aperture limit its applicability on strongly curved or extended freeform parts. The combination of a Shack-Hartmann sensor with a highly precise positioning system and a suitable registration algorithm can overcome these limitations. This paper presents an integrated and fully automated measurement system that is based on a scanning Shack-Hartmann sensor, demonstrates the enabled dynamic range extension, and presents measurement results obtained from a microscope objective with a numerical aperture of 0.65. The results show the capability of measuring a wavefront with an opening angle of ±80° and detecting an rms wavefront error of 0:28 λ.

Conference Presentation

Citation Download Citation

Martin Fuerst, Nikolaus Berlakovich, Ernst Csencsics, and Georg Schitter "Scanning Shack-Hartmann sensor for wavefront measurements on freeform optics", Proc. SPIE 12221, Optical Manufacturing and Testing XIV, 122210T (3 October 2022); https://doi.org/10.1117/12.2628328

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