Measurement of non-uniform AR-coated surfaces using an optical coordinate measurement machine with coating effect error compensation

R. Henselmans; M.J. Gouwerok; G. van den Eijkel

doi:10.1117/12.2633315

3 October 2022 Measurement of non-uniform AR-coated surfaces using an optical coordinate measurement machine with coating effect error compensation

R. Henselmans, M.J. Gouwerok, G. van den Eijkel

Author Affiliations +

Proceedings Volume 12221, Optical Manufacturing and Testing XIV; 122210N (2022) https://doi.org/10.1117/12.2633315
Event: SPIE Optical Engineering + Applications, 2022, San Diego, California, United States

Abstract

Measurement of surface form after coating application is a vital final quality control step, but generally difficult using noncontact optical methods as the signal is distorted or drastically reduced by the coating. The NMF non-contact measurement machine range for freeform optics by Dutch United Instruments (DUI) can be employed for measurements during the entire production process. It can measure ground, polished and coated surfaces. Especially non-uniform coated surfaces may however distort the signal of the probe. A correction technique is described that allows for correcting this influence, enabling accurate non-contact form measurement after application of the coating.

Conference Presentation

Citation Download Citation

R. Henselmans, M.J. Gouwerok, and G. van den Eijkel "Measurement of non-uniform AR-coated surfaces using an optical coordinate measurement machine with coating effect error compensation", Proc. SPIE 12221, Optical Manufacturing and Testing XIV, 122210N (3 October 2022); https://doi.org/10.1117/12.2633315

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available