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Ring resonators have been vastly considered to address the demand for future needs of smaller miniature array to reach compact and more sensitive ultrasound detectors. In this work we proposed a novel mechanically induced high sensitivity for a ring on an slotted membrane with relatively low-cost polymer material, roll to roll manufacturing ability, and less temperature-sensitivity. The results showing a 50 % sensitivity increase on the most sensitive device structure on simple membrane which has been reported. We also proposed its fabrication method by two-step nano-imprint lithography followed by AFM tip to make the slots on the membrane. This device could add benefits of early diseases detection in ultrasound biomedical imaging. Also, in a combination of an array with other ring resonators can cover larger dynamic range and frequency bandwidth.
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T. Sahraeibelverdi, H. Veladi, A. Shirazi, M. Malekshahi, "Polymer ring-resonator on a slotted membrane for ultrasound imaging," Proc. SPIE 12215, Optical Modeling and Performance Predictions XII, 122150H (3 October 2022); https://doi.org/10.1117/12.2646078