Blazed reflection gratings with electron-beam lithography and ion-beam etching

Drew M. Miles; Randall L. McEntaffer; Fabien Grisé

doi:10.1117/12.2637880

31 August 2022 Blazed reflection gratings with electron-beam lithography and ion-beam etching

Drew M. Miles, Randall L. McEntaffer, Fabien Grisé

Proceedings Volume 12181, Space Telescopes and Instrumentation 2022: Ultraviolet to Gamma Ray; 1218153 (2022) https://doi.org/10.1117/12.2637880
Event: SPIE Astronomical Telescopes + Instrumentation, 2022, Montréal, Québec, Canada

Abstract

In modern X-ray-grating development for astronomical applications, electron-beam lithography has emerged as a primary fabrication approach to producing high-performance reflection gratings for both current and future missions. The work presented here leverages years of development in electron-beam lithography for X-ray gratings to produce a grating pattern that is then blazed with ion-beam etching. The directional ion-beam etching reshapes the groove facets to a consistent, triangular profile with a facet angle specified by the grating application. An initial prototype X-ray reflection grating fabricated with a combination of electron-beam lithography and ion-beam etching is presented here, along with diffraction efficiency performance measured across the soft-X-ray bandpass. This first prototype achieves ≈33% absolute diffraction efficiency from 0.2 to 1.2 keV, with an average peak-order efficiency of ≈17%. The fabrication approach, efficiency measurements, and path toward improved performance are presented.

Citation Download Citation

Drew M. Miles, Randall L. McEntaffer, and Fabien Grisé "Blazed reflection gratings with electron-beam lithography and ion-beam etching", Proc. SPIE 12181, Space Telescopes and Instrumentation 2022: Ultraviolet to Gamma Ray, 1218153 (31 August 2022); https://doi.org/10.1117/12.2637880

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available