Analysis of transmittance of micro-nano structure

Yanni Gong; Yun Wang; Heng Zhao; Jinnneg Zeng; Le Chang; Tingtao Li; Xiaofeng Li

doi:10.1117/12.2624812

27 March 2022 Analysis of transmittance of micro-nano structure

Yanni Gong, Yun Wang, Heng Zhao, Jinnneg Zeng, Le Chang, Tingtao Li, Xiaofeng Li

Proceedings Volume 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications; 121696M (2022) https://doi.org/10.1117/12.2624812
Event: Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 2021, Kunming, China

Abstract

Micro-nano structure applied to photoelectric fields were made on high borosilicate glass by the MEMS process. This paper discussed the transmittance characteristics of micro-nanostructures by analyzing the transmittance of high borosilicate glass with different surface states and combining them with the theoretical analysis results. The transmittance of high borosilicate glass with different surface states was tested by an ultraviolet-visible spectrophotometer in the range of 400–850 nm. Through testing and comparison, it is found that the micro-nano structure makes the transmittance of high borosilicate glass obviously different in the test band. The average transmittance has been down 68%, and micro-nano structure can achieve anti-reflection in the specific band. Therefore, through matching the micro-nano structure with the photoelectric materials, the incident light could occur total reflection at the interface between the photoelectric materials and vacuum. Micro-nano structure can improve the utilization rate of light energy.

Citation Download Citation

Yanni Gong, Yun Wang, Heng Zhao, Jinnneg Zeng, Le Chang, Tingtao Li, and Xiaofeng Li "Analysis of transmittance of micro-nano structure", Proc. SPIE 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 121696M (27 March 2022); https://doi.org/10.1117/12.2624812

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KEYWORDS

Transmittance

Diffraction

Diffraction gratings

Borosilicate glass

Titanium dioxide

Refractive index

Interfaces

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