Paper
30 January 2022 Research of resonance frequencies of silicon membranes for a fiber-optic acoustic receiver
Author Affiliations +
Proceedings Volume 12157, International Conference on Micro- and Nano-Electronics 2021; 121570R (2022) https://doi.org/10.1117/12.2624430
Event: International Conference on Micro- and Nano-Electronics 2021, 2021, Zvenigorod, Russian Federation
Abstract
The article presents the results of designing, manufacturing, and studying the resonant properties of a square silicon membrane for use in a fiber-optic acoustic receiver. The dependences of resonant frequency on edge length (6-9 mm) and thickness of the membrane (30-50 μm) are obtained. The geometrical parameters of the membrane satisfying the values of resonant frequency (2-60 kHz), pressure (0.1-14 Pa), and deviation (10 nm) are determined: edge length is 8 mm and thickness is 40-50 μm (9.2-42.3 kHz). A series of square silicon membranes was fabricated by anisotropic wet etching. The amplitude-frequency characteristics of the membranes were experimentally measured using an adaptive holographic interferometer. For a square membrane of 8×8×0.044 m3, the experimentally measured resonant frequency was 10.1 kHz, which is consistent with the results of numerical simulation.
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sofya V. Malokhatko, Evgeny Yu. Gusev, Oleg A. Ageev, Timofey A. Efimov, Evgeny A. Rassolov, and Roman V. Romashko "Research of resonance frequencies of silicon membranes for a fiber-optic acoustic receiver", Proc. SPIE 12157, International Conference on Micro- and Nano-Electronics 2021, 121570R (30 January 2022); https://doi.org/10.1117/12.2624430
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KEYWORDS
Silicon

Acoustics

Fiber optics

Chemical elements

Interferometers

Receivers

Protactinium

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