Quantum efficiency improvement by backside pattern on resonant cavity enhanced LWIR nBn photodetectors

Ko Ku Kang; Seong Min Ryu; Tae Hee Lee; Jong Gi Kim; Ahreum Jang; Hyun Chul Jeong; Jun Ho Eom; Young Chul Kim; Hyun Jin Lee; Young Ho Kim; Han Jung; Sun Ho Kim; Jong Hwa Choi

doi:10.1117/12.2606352

27 May 2022 Quantum efficiency improvement by backside pattern on resonant cavity enhanced LWIR nBn photodetectors

Ko Ku Kang, Seong Min Ryu, Tae Hee Lee, Jong Gi Kim, Ahreum Jang, Hyun Chul Jeong, Jun Ho Eom, Young Chul Kim, Hyun Jin Lee, Young Ho Kim, Han Jung, Sun Ho Kim, Jong Hwa Choi

Author Affiliations +

Proceedings Volume 12107, Infrared Technology and Applications XLVIII; 1210722 (2022) https://doi.org/10.1117/12.2606352
Event: SPIE Defense + Commercial Sensing, 2022, Orlando, Florida, United States

Conference Poster

Abstract

Quantum efficiency (QE) is a important parameter of infrared detector. InAs/GaSb T2SL LWIR detector has a low QE due to a small absorption coefficient compared to MCT detector. The QE can be generally increased by thickening the absorber layer but a thick absorber layer increases dark current. In this work, the QE of the InAs/GaSb T2SL LWIR photodetector was improved by Fabry-Perot resonance phenomenon. Resonance cavity is formed between front side metal and backside semiconductor-air interface mirror. At a specific wavelength, the QE is periodically increased by the resonance cavity. To broaden the resonant wavelength band, a grid pattern was formed on the backside of the detector. Consequently, the average QE of T2SL LWIR detector was improved up to ~33 % in the entire 7-9 m wavelength.

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Ko Ku Kang, Seong Min Ryu, Tae Hee Lee, Jong Gi Kim, Ahreum Jang, Hyun Chul Jeong, Jun Ho Eom, Young Chul Kim, Hyun Jin Lee, Young Ho Kim, Han Jung, Sun Ho Kim, and Jong Hwa Choi "Quantum efficiency improvement by backside pattern on resonant cavity enhanced LWIR nBn photodetectors", Proc. SPIE 12107, Infrared Technology and Applications XLVIII, 1210722 (27 May 2022); https://doi.org/10.1117/12.2606352

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