Developing the MEMS microbolometer

Kevin C. Liddiard

doi:10.1117/12.2627763

30 May 2022 Developing the MEMS microbolometer

Kevin C. Liddiard

Proceedings Volume 12107, Infrared Technology and Applications XLVIII; 121071D (2022) https://doi.org/10.1117/12.2627763
Event: SPIE Defense + Commercial Sensing, 2022, Orlando, Florida, United States

Abstract

This presentation will describe the development of of the first MEMS microbolometer at the Australian Defence Science and Technology Organisation

Conference Presentation

Citation Download Citation

Kevin C. Liddiard "Developing the MEMS microbolometer", Proc. SPIE 12107, Infrared Technology and Applications XLVIII, 121071D (30 May 2022); https://doi.org/10.1117/12.2627763

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