Paper
13 December 2021 Ultra-precision milling technology of micro-intersecting cylindrical mandrel with high surface quality for ICF
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Proceedings Volume 12073, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced and Extreme Micro-Nano Manufacturing Technologies; 1207305 (2021) https://doi.org/10.1117/12.2605041
Event: Tenth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2021), 2021, Chengdu, China
Abstract
The micro-intersecting cylindrical mandrel is a kind of high precision optical micro-nano element in the inertial confinement fusion (ICF) experiment. It has a complex structure and high precision requirement, and its machining quality directly affects the accuracy of ICF experiment. In this paper, the ultra-precision milling technology of polycrystalline oxygen-free copper micro-intersecting cylindrical mandrel was carried out. The composition of the surface defects after cutting were determined, and the formation mechanisms of different defects were analyzed. The optimal ultra-precision milling process was designed. The surface roughness Ra value of the machined cylinder 1 is 16 nm, and the Rq value is 21 nm. The surface roughness Ra value of the machined cylinder 1 is 20 nm, and the Rq value is 24 nm. Besides, the boundary defect in the transition arc region was eliminated. Finally, the polycrystalline oxygen-free copper micro-intersecting cylinder part with high surface quality and near no defect was manufactured after ultra-precision milling.
© (2021) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chunyu Zhang, Guo Li, Haijun Zhang, and Junjie Zhang "Ultra-precision milling technology of micro-intersecting cylindrical mandrel with high surface quality for ICF", Proc. SPIE 12073, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced and Extreme Micro-Nano Manufacturing Technologies, 1207305 (13 December 2021); https://doi.org/10.1117/12.2605041
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KEYWORDS
Surface roughness

Copper

Diamond

Metals

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