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19 November 2021 Design and verification of micro/nano probes for coordinate measuring machines (Withdrawal Notice)
Peng Xu, Rui Jun Li, Xiao Yu Feng, Kuang Chao Fan
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Proceedings Volume 12059, Tenth International Symposium on Precision Mechanical Measurements; 120591Q (2021) https://doi.org/10.1117/12.2613440
Event: Tenth International Symposium on Precision Mechanical Measurements, 2021, Qingdao, China
Abstract
Publisher’s Note: This paper, originally published on 19 November 2021 was withdrawn on 30 November 2021 per author request.
© (2021) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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Peng Xu, Rui Jun Li, Xiao Yu Feng, and Kuang Chao Fan "Design and verification of micro/nano probes for coordinate measuring machines (Withdrawal Notice)", Proc. SPIE 12059, Tenth International Symposium on Precision Mechanical Measurements, 120591Q (19 November 2021); https://doi.org/10.1117/12.2613440
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KEYWORDS
Sensors
Digital video discs
Head
Mirrors
Michelson interferometers
Glasses
Optical sensors
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