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19 November 2021 Design of a high-precision two-dimensional coplanar micro-vibration generator
Lian-sheng Zhang, Ke-Wei Bian, Ying-jun Lei, Rui-Jun Li, Kuang-Chao Fan
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Proceedings Volume 12059, Tenth International Symposium on Precision Mechanical Measurements; 120591L (2021) https://doi.org/10.1117/12.2612275
Event: Tenth International Symposium on Precision Mechanical Measurements, 2021, Qingdao, China
Abstract
A high-precision two-dimensional (2D) coplanar micro-vibration generator with a flexure decoupling mechanism is proposed in this study. The generator is composed of a 2D symmetrical coplanar platform and a slider pair. The 2D coplanar platform structure is fully symmetric to achieve decoupling of motion in the X and Y directions. The vertical support with a slider pair is used to guarantee strict planar motion with heavy loads. Under open-loop control, the developed generator has the capability of translational motion stroke of 48.71 μm and 49.10 μm in the X and Y directions, respectively, and the maximum coupling error is approximately 0.78%. A PID control system was designed to realize the closed-loop control of the vibration generator. The control system can effectively reduce the inertial vibration and settling time of the generator. In addition, the closed-loop controlled vibration generator also has good motion tracking characteristics.
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Lian-sheng Zhang, Ke-Wei Bian, Ying-jun Lei, Rui-Jun Li, and Kuang-Chao Fan "Design of a high-precision two-dimensional coplanar micro-vibration generator", Proc. SPIE 12059, Tenth International Symposium on Precision Mechanical Measurements, 120591L (19 November 2021); https://doi.org/10.1117/12.2612275
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KEYWORDS
Actuators
Control systems
Structural design
Calibration
Sensors
Control systems design
Standards development
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