Noise floor comparison of optical displacement measuring interferometer between air and vacuum environments

Masato Aketagawa; Kousuke Sakasai; Masato Higuchi; Dong Wei; Thanh Dong Nguyen

doi:10.1117/12.2616260

27 October 2021 Noise floor comparison of optical displacement measuring interferometer between air and vacuum environments

Masato Aketagawa, Kousuke Sakasai, Masato Higuchi, Dong Wei, Thanh Dong Nguyen

Author Affiliations +

Proceedings Volume 11927, Optical Technology and Measurement for Industrial Applications Conference 2021; 119270D (2021) https://doi.org/10.1117/12.2616260
Event: SPIE Technologies and Applications of Structured Light, 2021, Online, Japan

Abstract

In this presentation, we discuss noise floor comparisons of an optical displacement measuring interferometer between air and vacuum environments. A heterodyne interferometer and its phasemeter, with the resolution of 10-6 radian, implemented in a field programmable gate array (FPGA) are utilized for the comparison. A heterodyne laser source consists of a frequency stabilized He-Ne laser and two acoustic optic modulators (AOMs). The interferometer optics and a piezoelectric (PZT) flexure stage which drives the moving retroreflector of the interferometer are placed in a vacuum chamber. In the vacuum environment at 3 mPa, the noise floor of 1 pm/ÖHz or less is attained in the frequency range of 0.01 ~ 100 Hz.

Citation Download Citation

Masato Aketagawa, Kousuke Sakasai, Masato Higuchi, Dong Wei, and Thanh Dong Nguyen "Noise floor comparison of optical displacement measuring interferometer between air and vacuum environments", Proc. SPIE 11927, Optical Technology and Measurement for Industrial Applications Conference 2021, 119270D (27 October 2021); https://doi.org/10.1117/12.2616260

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