Investigation of properties of the stacked-actuator deformable mirror made of the piezoceramic combs

Vladimir Toporovskiy; Alexis Kudryashov; Vadim Samarkin; Anatoliy Panich; Alexander Sokallo; Anatoliy Malykhin

doi:10.1117/12.2603503

15 December 2021 Investigation of properties of the stacked-actuator deformable mirror made of the piezoceramic combs

Vladimir Toporovskiy, Alexis Kudryashov, Vadim Samarkin, Anatoliy Panich, Alexander Sokallo, Anatoliy Malykhin

Proceedings Volume 11916, 27th International Symposium on Atmospheric and Ocean Optics, Atmospheric Physics; 119161I (2021) https://doi.org/10.1117/12.2603503
Event: 27th International Symposium on Atmospheric and Ocean Optics, Atmospheric Physics, 2021, Moscow, Russian Federation

Abstract

The stacked-actuator deformable mirror with a high spatial resolution of the control elements was developed. The key advantage of such a mirror is its simplicity of design, thanks to the use of piezoceramic combs. Each comb consists of 5 piezo actuators arranged in a row. By assembling such combs on a piezoceramic base, it is possible to obtain the desired geometry of the control elements of the piezoactuator mirror. On an aperture of 50 * 50 mm, 100 actuators were placed in a rectangular configuration, on which a reflective substrate with a thickness of 1 mm was glued. A deformation of the mirror of 4.5 μm was obtained under the action of a control voltage of +300 V.

Citation Download Citation

Vladimir Toporovskiy, Alexis Kudryashov, Vadim Samarkin, Anatoliy Panich, Alexander Sokallo, and Anatoliy Malykhin "Investigation of properties of the stacked-actuator deformable mirror made of the piezoceramic combs", Proc. SPIE 11916, 27th International Symposium on Atmospheric and Ocean Optics, Atmospheric Physics, 119161I (15 December 2021); https://doi.org/10.1117/12.2603503

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