Diffraction method for estimation of positioning errors that occurred during the writing of computer-generated holograms

Ruslan V. Shimansky; Victor P. Korolkov; Dmitrij A. Belousov; Roman I. Kuts

doi:10.1117/12.2604292

9 October 2021 Diffraction method for estimation of positioning errors that occurred during the writing of computer-generated holograms

Ruslan V. Shimansky, Victor P. Korolkov, Dmitrij A. Belousov, Roman I. Kuts

Author Affiliations +

Proceedings Volume 11895, Optical Design and Testing XI; 118951B (2021) https://doi.org/10.1117/12.2604292
Event: SPIE/COS Photonics Asia, 2021, Nantong, JS, China

Conference Poster

Abstract

Computer-generated holograms (CGH) due to their wide capabilities to transform the wavefront of light beams are used to solve various problems including interferometric measurements spherical and aspherical wavefronts. The errors of the wavefront formed by CGH are primarily related with errors in the hologram structure. One of main reasons for the errors in the CGH fabrication by the laser writing technology is the positioning errors of the laser writing system. Earlier methods based on the analysis of the parameters of embedded microstructures were developed to define these errors. In these methods, separate microstructures are used to determine the error value for each coordinate of the beam scanning system. This paper presents the testing method based on writing and diffractometric analysis of embedded small 2D marks containing two pairs of linear gratings. In each pair, one linear grating is shifted relative to the other by given amount. The gratings in one pair are rotated 90 degrees relative to the gratings in the other pair. Each 2D-mark is formed in two stages. One grating in each pair is quickly formed before CGH writing and the second grating is formed directly in the process of the writing. Defining the deviation of the shifts from the given values for each grating pair allows one to estimate the positioning errors along both coordinates by one mark. When the 2D-mark is illuminated with a probe laser beam, the shift leads to a redistribution of the diffraction efficiency between the diffraction orders. The analysis of the obtained diffraction patterns from series of the 2D-marks makes it possible to control the errors of the CGH structure as function of time for whole writing process.

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Ruslan V. Shimansky, Victor P. Korolkov, Dmitrij A. Belousov, and Roman I. Kuts "Diffraction method for estimation of positioning errors that occurred during the writing of computer-generated holograms", Proc. SPIE 11895, Optical Design and Testing XI, 118951B (9 October 2021); https://doi.org/10.1117/12.2604292

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