Servo circuit of quartz flexible accelerometer with low power consumption and high integration

Ming Zhang; Huanhuan Wan; Xin Xu; Xiaoming Ruan

doi:10.1117/12.2592368

26 January 2021 Servo circuit of quartz flexible accelerometer with low power consumption and high integration

Ming Zhang, Huanhuan Wan, Xin Xu, Xiaoming Ruan

Proceedings Volume 11767, 2020 International Conference on Optoelectronic Materials and Devices; 117670O (2021) https://doi.org/10.1117/12.2592368
Event: 2020 International Conference on Optoelectronic Materials and Devices, 2020, Guangzhou, China

Abstract

The accelerometer servo circuit is one of the important components in the inertial measurement system. Based on the working principle of the quartz flexible accelerometer and the composition of the hybrid integrated quartz flexible accelerometer servo circuit, this paper developed a quartz flexible accelerometer servo circuit with low power consumption and high integration using a linear stabilized power supply servo transconductance/compensation amplifier. The development of this circuit has guiding significance for the development of the traditional quartz flexible accelerometer servo circuit.

Citation Download Citation

Ming Zhang, Huanhuan Wan, Xin Xu, and Xiaoming Ruan "Servo circuit of quartz flexible accelerometer with low power consumption and high integration", Proc. SPIE 11767, 2020 International Conference on Optoelectronic Materials and Devices, 117670O (26 January 2021); https://doi.org/10.1117/12.2592368

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