Contamination Effects On Optical Surfaces

W. P. Saylor; M. C. Hanichak

doi:10.1117/12.962861

2 January 1990 Contamination Effects On Optical Surfaces

W. P. Saylor, M. C. Hanichak

Proceedings Volume 1165, Scatter from Optical Components; (1990) https://doi.org/10.1117/12.962861
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

A model of the total surface BRDF (Bidirectional Reflection Distribution Function) of optical surfaces has been developed to account for forward and backscatter of light as a result of particulate contamination. Measurements of several different optical surfaces are presented before and after particulate contamination in clean rooms and the forward and backscatter components are described. The prediction of the total BRDF using the model is correlated to the data.

Citation Download Citation

W. P. Saylor and M. C. Hanichak "Contamination Effects On Optical Surfaces", Proc. SPIE 1165, Scatter from Optical Components, (2 January 1990); https://doi.org/10.1117/12.962861

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