Application And Verification Of Wavelength Scaling For Near Specular Scatter Predictions

Cynthia L. Vernold

doi:10.1117/12.962833

2 January 1990 Application And Verification Of Wavelength Scaling For Near Specular Scatter Predictions

Cynthia L. Vernold

Proceedings Volume 1165, Scatter from Optical Components; (1990) https://doi.org/10.1117/12.962833
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

When performing scatter measurements, it is always difficult to acquire accurate scatter data close to the specular beam. Most scatterometers are unable to obtain scatter information closer than one or two degrees from specular. In nearly all cases finite detector apertures and instrument background levels are the limiting factors. Since it is impossible to obtain infinitely small detector apertures or scatter-free system optics, an alternative approach to this problem must be used. A wavelength scaling law based on Fourier theory offers such an approach. This paper presents wavelength scaling data with test wavelengths ranging from 0.325 to 10.6 gm. Upon verifying wavelength scaling over common spatial frequency bandwidths, it is shown that scattering information at small angles from specular can be predicted with a high degree of confidence.

Citation Download Citation

Cynthia L. Vernold "Application And Verification Of Wavelength Scaling For Near Specular Scatter Predictions", Proc. SPIE 1165, Scatter from Optical Components, (2 January 1990); https://doi.org/10.1117/12.962833

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