Author Affiliations +
D. Schmidt,1 C. Durfee,1 J. Li,1 N. Loubet,1 A. Cepler,2 L. Neeman,3 N. Meir,3 J. Ofek,3 Y. Oren,3 D. Fishman4
1IBM Research (United States)
2Nova Measuring Instruments Inc. (United States)
3Nova Measuring Instruments Ltd. (Israel)
4Nova Measuring Instruments Lt.d (Israel)