Paper
28 July 1989 Metal Oxide Multilayers With Narrow Band-Passes
J. P. Delaboudiniere, T. K. Vien, J. P. Chauvineau
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Abstract
Metal oxide multilayers provide reflecting coatings in the 15-50 nm range with exceptionnal properties. We discuss filters featuring narrow band-passes and/or very sharp cut-offs. Possible effects of degraded manufacturing processes are also evaluated.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. P. Delaboudiniere, T. K. Vien, and J. P. Chauvineau "Metal Oxide Multilayers With Narrow Band-Passes", Proc. SPIE 1160, X-Ray/EUV Optics for Astronomy and Microscopy, (28 July 1989); https://doi.org/10.1117/12.962649
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Silicon

Oxides

Multilayers

Metals

Reflectivity

Molybdenum

Absorption

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