Study on the optimization of parameters in ultrasonic vibration turning of single crystal silicon

Xiaodong Zhang; Feng Shi; Guipeng Tie; Yongxiang Shen

doi:10.1117/12.2580188

5 November 2020 Study on the optimization of parameters in ultrasonic vibration turning of single crystal silicon

Xiaodong Zhang, Feng Shi, Guipeng Tie, Yongxiang Shen

Proceedings Volume 11568, AOPC 2020: Optics Ultra Precision Manufacturing and Testing; 115681O (2020) https://doi.org/10.1117/12.2580188
Event: Applied Optics and Photonics China (AOPC 2020), 2020, Beijing, China

Abstract

The ultrasonic vibration cutting (UVC) method is an efficient cutting technique for the hard and brittle materials. The influence of ultrasonic vibration parameters on the critical cutting thickness (CCT) of single crystal silicon was investigated by spirally grooving experiment, and a series of experimental trials were carried out by using different cutting duty ratios (CDR). The results show that: the ultrasonic vibration efficiency is closely related to CDR, and increases with the decrease of CDR; when the ultrasonic vibration frequency and velocity were fixed, the CCT decreases as the vibration amplitude increases; the smaller the CDR is, the higher the surface finish of single crystal silicon machined by UVC will achieve. In the cutting tests, the experiment in which the value of CDR is 0.13, realized the ductile mode cutting for the Φ100mm specimen in the whole area.

Citation Download Citation

Xiaodong Zhang, Feng Shi, Guipeng Tie, and Yongxiang Shen "Study on the optimization of parameters in ultrasonic vibration turning of single crystal silicon", Proc. SPIE 11568, AOPC 2020: Optics Ultra Precision Manufacturing and Testing, 115681O (5 November 2020); https://doi.org/10.1117/12.2580188

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available