Development of shape measurement system for high precision Wolter mandrel

Takehiro Kume; Hirokazu Hashizume; Kentarou Hiraguri; Yusuke Matsuzawa; Yoichi Imamura; Hiroaki Miyashita; Takahiro Saito; Gota Yamaguchi; Yoko Takeo; Yasunori Senba; Hikaru Kishimoto; Haruhiko Ohashi; Hidekazu Mimura

doi:10.1117/12.2568929

21 August 2020 Development of shape measurement system for high precision Wolter mandrel

Takehiro Kume, Hirokazu Hashizume, Kentarou Hiraguri, Yusuke Matsuzawa, Yoichi Imamura, Hiroaki Miyashita, Takahiro Saito, Gota Yamaguchi, Yoko Takeo, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, Hidekazu Mimura

Author Affiliations +

Proceedings Volume 11492, Advances in Metrology for X-Ray and EUV Optics IX; 114920M (2020) https://doi.org/10.1117/12.2568929
Event: SPIE Optical Engineering + Applications, 2020, Online Only

Abstract

Since a replication-type of the Wolter mirror is obtained as the negative shape of its mandrel via shape replication represented by electroforming, a high precision mandrel fabrication process is essential for nano-focusing with the mirror at synchrotron radiation facilities. In particular, three-dimensional shape measurement technique for the mandrel is required. In this study, we developed the high precision three-dimensional shape measurement system dedicated for the Wolter mandrels. First, the shape error distributions of the ellipsoidal surface and the hyperboloid surface were measured independently. The geometrical relation between the surfaces was constrained by the longitudinal profiles which include the intersection measured by a profilometer. The diameter was also measured and finally the three-dimensional shape distribution was obtained. Applying this system, we fabricated a high precision Wolter mandrel.

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Takehiro Kume, Hirokazu Hashizume, Kentarou Hiraguri, Yusuke Matsuzawa, Yoichi Imamura, Hiroaki Miyashita, Takahiro Saito, Gota Yamaguchi, Yoko Takeo, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, and Hidekazu Mimura "Development of shape measurement system for high precision Wolter mandrel", Proc. SPIE 11492, Advances in Metrology for X-Ray and EUV Optics IX, 114920M (21 August 2020); https://doi.org/10.1117/12.2568929

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