Design of short silicon Kinoform lens for hard x-ray focusing

Limin Meng; Liangliang Du; Ran An; Dongbing Liu; Yan Ye

doi:10.1117/12.2552449

31 January 2020 Design of short silicon Kinoform lens for hard x-ray focusing

Limin Meng, Liangliang Du, Ran An, Dongbing Liu, Yan Ye

Proceedings Volume 11427, Second Target Recognition and Artificial Intelligence Summit Forum; 114272L (2020) https://doi.org/10.1117/12.2552449
Event: Second Target Recognition and Artificial Intelligence Summit Forum, 2019, Changchun, China

Abstract

The focusing of hard X-ray is limited by the ability to design and to fabricate high-quality optics. The gains in resolution are often made at a sacrifice of focusing efficiency. The short Kinoform lenses offer a compromise position of high resolution and efficiency. Here we describe the design and the properties simulation of a series of short Kinoform lenses. After optimizing of the main characteristics, the focus spots size of the designed short Kinoform lens were proved to sub 500nm at photon energy of 30 keV.

Citation Download Citation

Limin Meng, Liangliang Du, Ran An, Dongbing Liu, and Yan Ye "Design of short silicon Kinoform lens for hard x-ray focusing", Proc. SPIE 11427, Second Target Recognition and Artificial Intelligence Summit Forum, 114272L (31 January 2020); https://doi.org/10.1117/12.2552449

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