Grating Moire Effects With Partially Coherent Illumination And Detection

Joseph Braat

doi:10.1117/12.961744

11 October 1989 Grating Moire Effects With Partially Coherent Illumination And Detection

Joseph Braat

Proceedings Volume 1138, Optical Microlithography and Metrology for Microcircuit Fabrication; (1989) https://doi.org/10.1117/12.961744
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France

Abstract

We present an analysis of the imaging of a linear grating with an extended illuminating source and of the moire effect with a second grating in the image plane. The light transmitted by the moire grating is captured by a detector with finite angular extent. The amplitude and the phase shift of the moire signal are calculated in the presence of both symmetrical and asymmetrical aberrations of the imaging lens; the influence of both the source and the detector size are taken into account. A comparison is made between the axial and transverse position of imaged features (e.g. the position of an imaged edge) and the position of the grating as predicted by the phase and the maximum modulation depth of the moire signal. The offset between the aerial image position and the detected grating position should be known when one uses the moire signal for the testing of the lens in a lithographic projection system. Numerically calculated values of this offset are given for a number of practical situations.

Citation Download Citation

Joseph Braat "Grating Moire Effects With Partially Coherent Illumination And Detection", Proc. SPIE 1138, Optical Microlithography and Metrology for Microcircuit Fabrication, (11 October 1989); https://doi.org/10.1117/12.961744

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