High-density and uniform-size GaN/Al0.5GaN self-assembled quantum dots grown by metalorganic chemical vapor deposition

Zhiqiang Qi; Haocheng Sun; Wenliang Hu

doi:10.1117/12.2547302

18 December 2019 High-density and uniform-size GaN/Al_0.5GaN self-assembled quantum dots grown by metalorganic chemical vapor deposition

Zhiqiang Qi, Haocheng Sun, Wenliang Hu

Author Affiliations +

Proceedings Volume 11336, AOPC 2019: Nanophotonics; 113360E (2019) https://doi.org/10.1117/12.2547302
Event: Applied Optics and Photonics China (AOPC2019), 2019, Beijing, China

Abstract

Self-assembled GaN/Al_0.5GaN quantum dots (QDs) were grown on a c-plane sapphire by Stranski- Krastanov (S-K) mode in metalorganic vapor-phase epitaxy (MOCVD). The growth window for GaN QDs by S-K is very narrow owing to the small lattice mismatch (1.25%) of the GaN/Al_0.5GaN. In this work, we find that the growth duration and growth interruption possess distinct and regular effects on the size and density of GaN/Al0.5GaN QDs, which can be utilized as growth optimization windows. In the end, the uniform-size GaN QDs with a density of 1.7×10¹⁰ cm^-2 are achieved. A strong PL peak at 3.36eV originated from the uncapped GaN/Al0.5GaN QDs is observed, compared with the peak at 4.5eV assigned to the underlying Al_0.5GaN template.

Citation Download Citation

Zhiqiang Qi, Haocheng Sun, and Wenliang Hu "High-density and uniform-size GaN/Al_0.5GaN self-assembled quantum dots grown by metalorganic chemical vapor deposition", Proc. SPIE 11336, AOPC 2019: Nanophotonics, 113360E (18 December 2019); https://doi.org/10.1117/12.2547302

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