Progress in availably of NXE:3400B EUVL sources in the field and power scaling towards 500W (Conference Presentation)

David C. Brandt; Igor Fomenkov; Jayson Stewart

doi:10.1117/12.2552424

24 March 2020 Progress in availably of NXE:3400B EUVL sources in the field and power scaling towards 500W (Conference Presentation)

David C. Brandt, Igor Fomenkov, Jayson Stewart

Author Affiliations +

Proceedings Volume 11323, Extreme Ultraviolet (EUV) Lithography XI; 113230W (2020) https://doi.org/10.1117/12.2552424
Event: SPIE Advanced Lithography, 2020, San Jose, California, United States

Abstract

Multiple ASML’s NXE:3400B scanners are installed at the factories and slated to go to a high volume manufacturing (HVM) phase. The latest generation of the scanners NXE:3400C has an improved performance and availability also due to availability improvement of the EUV sources by implementing modularity concept. In this paper, we provide an overview of a tin laser-produced-plasma (LPP) extreme-ultraviolet (EUV) sources at 13.5nm enabling HVM at the N7 node and beyond. The field performance of the source at 250 watts power including the performance of subsystems such as the Collector and the Droplet Generator will be shown. Progress in the development of key technologies for power scaling towards 500W will be described.

Conference Presentation

Citation Download Citation

David C. Brandt, Igor Fomenkov, and Jayson Stewart "Progress in availably of NXE:3400B EUVL sources in the field and power scaling towards 500W (Conference Presentation)", Proc. SPIE 11323, Extreme Ultraviolet (EUV) Lithography XI, 113230W (24 March 2020); https://doi.org/10.1117/12.2552424

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available