Removal Process Of Ceramic Materials With Excimer Laser Radiation

H. K. Tonshoff; O. Gedrat

doi:10.1117/12.961569

26 October 1989 Removal Process Of Ceramic Materials With Excimer Laser Radiation

H. K. Tonshoff, O. Gedrat

Proceedings Volume 1132, High Power Lasers and Laser Machining Technology; (1989) https://doi.org/10.1117/12.961569
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France

Abstract

Because of its specific features, shortest pulses with highest pulse power, excimer laser radiation seems to be suitable for processing ceramics. It reveals high surface quality and enables a 2- or 3-dimensional structuring in the field of micro machining. This paper deals with the interaction process between ceramic materials and excimer laser radiation. The effect of different beam parameters on the removal result and the laser affected zone respectively and further capabiltities of material processing with UV-radiation for various industrial applications are discussed.

Citation Download Citation

H. K. Tonshoff and O. Gedrat "Removal Process Of Ceramic Materials With Excimer Laser Radiation", Proc. SPIE 1132, High Power Lasers and Laser Machining Technology, (26 October 1989); https://doi.org/10.1117/12.961569

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