Direct laser writing below the diffraction limit using spatially and temporally tuned ultrashort pulses

Boyang Zhou; Aravindar Kar; MJ Soileau; Xiaoming Yu

doi:10.1117/12.2550450

28 February 2020 Direct laser writing below the diffraction limit using spatially and temporally tuned ultrashort pulses

Boyang Zhou, Aravindar Kar, MJ Soileau, Xiaoming Yu

Author Affiliations +

Proceedings Volume 11292, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII; 1129215 (2020) https://doi.org/10.1117/12.2550450
Event: SPIE OPTO, 2020, San Francisco, California, United States

Abstract

We report on the experimental and theoretical study of direct laser writing on dielectrics with reduced feature size by using temporally and spatially separated pulses. Features on the front surface of fused silica within the overlapping area of two laser pulses are obtained by tuning the delay time between the two pulses. The observed dependence of feature position on delays longer than the free-carrier lifetime indicates an ionization pathway initiated by self-trapped excitons. The sensitivity of feature size with the increase of laser intensity is studied by simulating the free-carrier density distribution for different temporal and spatial separation of two laser pulses. It is found that the sensitivity is influenced by the spatial and temporal separation of the two pulses.

Conference Presentation

Citation Download Citation

Boyang Zhou, Aravindar Kar, MJ Soileau, and Xiaoming Yu "Direct laser writing below the diffraction limit using spatially and temporally tuned ultrashort pulses", Proc. SPIE 11292, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII, 1129215 (28 February 2020); https://doi.org/10.1117/12.2550450

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available