Electrooptical Incremental Measuring System

Milan Suchomel; Jiri Wurtherle

doi:10.1117/12.961338

3 April 1989 Electrooptical Incremental Measuring System

Milan Suchomel, Jiri Wurtherle

Proceedings Volume 1121, Interferometry '89; (1989) https://doi.org/10.1117/12.961338
Event: Interferometry '89, 1989, Warsaw, Poland

Abstract

Artical is dedicated to solving some problems connected with lanufacturing accurate master scales with standard graduation of 10 μm - master scales making and checking on machine controlled by laserinterferometer - achievment the best quality of photoprocess

Citation Download Citation

Milan Suchomel and Jiri Wurtherle "Electrooptical Incremental Measuring System", Proc. SPIE 1121, Interferometry '89, (3 April 1989); https://doi.org/10.1117/12.961338

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