Combustion wave of monocrystalline silicon induced by millisecond laser

Ming Guo; Yongxiang Zhang; Wenying Zhang; Chunyan Xu

doi:10.1117/12.2543851

20 December 2019 Combustion wave of monocrystalline silicon induced by millisecond laser

Ming Guo, Yongxiang Zhang, Wenying Zhang, Chunyan Xu

Proceedings Volume 11209, Eleventh International Conference on Information Optics and Photonics (CIOP 2019); 1120917 (2019) https://doi.org/10.1117/12.2543851
Event: Eleventh International Conference on Information Optics and Photonics (CIOP 2019), 2019, Xi'an, China

Abstract

In order to study the evolution state of silicon combustion wave induced by millisecond pulse laser in monocrystalline silicon, Using optical shadow imaging to measure the distance and time of combustion wave, analyze the plasma state at different times, Study the influence from different laser energy density and the number of pluses to expansion rate and expansion distance. The results of research show that the direction of combustion wave expand is mainly the reverse of the incident laser. The pulse train of millisecond laser act on monocrystalline silicon produce a temperature accumulation effect, and the threshold value declines obviously. the peak expansion rate increases rapidly as the energy density increases.

Citation Download Citation

Ming Guo, Yongxiang Zhang, Wenying Zhang, and Chunyan Xu "Combustion wave of monocrystalline silicon induced by millisecond laser", Proc. SPIE 11209, Eleventh International Conference on Information Optics and Photonics (CIOP 2019), 1120917 (20 December 2019); https://doi.org/10.1117/12.2543851

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