Development of laser induced breakdown spectrometer with total internal reflection surface for thin film analysys

Nikolay N. Dostovalov

doi:10.1117/12.2540904

18 December 2019 Development of laser induced breakdown spectrometer with total internal reflection surface for thin film analysys

Nikolay N. Dostovalov

Author Affiliations +

Proceedings Volume 11208, 25th International Symposium on Atmospheric and Ocean Optics: Atmospheric Physics; 112082L (2019) https://doi.org/10.1117/12.2540904
Event: XXV International Symposium, Atmospheric and Ocean Optics, Atmospheric Physics, 2019, Novosibirsk, Russian Federation

Abstract

About development of laser induced breakdown spectrometer for analysis of thin film or layer of particles with size less than 100 nm, deposited on the surface of a transparent substrate.

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Nikolay N. Dostovalov "Development of laser induced breakdown spectrometer with total internal reflection surface for thin film analysys", Proc. SPIE 11208, 25th International Symposium on Atmospheric and Ocean Optics: Atmospheric Physics, 112082L (18 December 2019); https://doi.org/10.1117/12.2540904

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