Antireflective moth-eye structures on curved surfaces fabricated by nanoimprint lithography

Michael J. Haslinger; Amiya R. Moharana; Michael Mühlberger

doi:10.1117/12.2535683

29 August 2019 Antireflective moth-eye structures on curved surfaces fabricated by nanoimprint lithography

Michael J. Haslinger, Amiya R. Moharana, Michael Mühlberger

Proceedings Volume 11177, 35th European Mask and Lithography Conference (EMLC 2019); 111770K (2019) https://doi.org/10.1117/12.2535683
Event: 35th European Mask and Lithography Conference, 2019, Dresden, Germany

Abstract

In this work, we describe an effective and simple method for surface patterning of 3D objects with antireflective moth-eye structures via UV based nanoimprint lithography using soft stamps. So-called anti-reflective moth-eye structures are subwavelength nanostructures that can reduce the reflection of surfaces over the entire visible spectrum of light. Such broadband antireflective coatings are especially interesting for optical elements like lenses.

Citation Download Citation

Michael J. Haslinger, Amiya R. Moharana, and Michael Mühlberger "Antireflective moth-eye structures on curved surfaces fabricated by nanoimprint lithography", Proc. SPIE 11177, 35th European Mask and Lithography Conference (EMLC 2019), 111770K (29 August 2019); https://doi.org/10.1117/12.2535683

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