Extreme-ultraviolet pellicle durability comparison for better lifetime

Hyo-Gyeong Shin; Hye-Keun Oh

doi:10.1117/12.2536992

26 September 2019 Extreme-ultraviolet pellicle durability comparison for better lifetime

Hyo-Gyeong Shin, Hye-Keun Oh

Proceedings Volume 11147, International Conference on Extreme Ultraviolet Lithography 2019; 111470U (2019) https://doi.org/10.1117/12.2536992
Event: SPIE Photomask Technology + EUV Lithography, 2019, Monterey, California, United States

Abstract

To accelerate extreme ultraviolet lithography manufacturing, a better pellicle which has a longer lifetime is required. Various materials and their combinations are suggested and implemented to extend the lifetime. Using finite element method, we analyzed the mechanical behavior of pellicle in terms of crack time when a pellicle begins to tear off. Without thermal property analysis, we were able to get relative crack times for various pellicle structures. Single walled carbon nanotube has the largest relative crack time but needed to be commercialization and multi-layer pSi core pellicle has longer lifetime than a single pSi core pellicle. Additionally, increasing Ru capping layer helps to strengthen the mechanical properties of the pSi core pellicle.

Conference Presentation

Citation Download Citation

Hyo-Gyeong Shin and Hye-Keun Oh "Extreme-ultraviolet pellicle durability comparison for better lifetime", Proc. SPIE 11147, International Conference on Extreme Ultraviolet Lithography 2019, 111470U (26 September 2019); https://doi.org/10.1117/12.2536992

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