XUV coherence tomography: a novel approach to nanoscale 3D imaging (Conference Presentation)

Martin Wünsche; Silvio Fuchs; Jan Nathanael; Johann J. Abel; Julius Reinhard; Felix Wiesner; Slawomir Skruszewicz; Christian Rödel; Gerhard G. Paulus

doi:10.1117/12.2528684

9 September 2019 XUV coherence tomography: a novel approach to nanoscale 3D imaging (Conference Presentation)

Martin Wünsche, Silvio Fuchs, Jan Nathanael, Johann J. Abel, Julius Reinhard, Felix Wiesner, Slawomir Skruszewicz, Christian Rödel, Gerhard G. Paulus

Author Affiliations +

Proceedings Volume 11112, X-Ray Nanoimaging: Instruments and Methods IV; 111120U (2019) https://doi.org/10.1117/12.2528684
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

Optical coherence tomography (OCT) is an established method for non-invasive cross-sectional imaging of biological samples using visible and near infrared light. The axial resolution of OCT only depends on the coherence length l_c∝λ_0^2/Δλ_FWHM, with the central wavelength λ_0 and the spectral width Δλ_FWHM of the light source. For OCT, the axial resolution is in the range of a few micrometers. XUV coherence tomography (XCT) extends OCT into the extreme ultraviolet range. The significant reduction of the coherence length of a broadband XUV source allows nanoscale axial resolution. The usable spectral bandwidth in XCT is mainly limited by absorption edges of the sample under investigation. For example, the so-called silicon transmission window allows cross-sectional imaging of silicon-based samples like semiconductors. A laboratory-based XCT setup has been implemented by using XUV radiation from a laser-driven high-harmonic source. By averaging harmonic combs generated by different fundamental wavelengths, a quasi-supercontinuous spectrum, which is well-suited for XCT, is generated. The radiation is focused onto the sample and the reflected radiation is recorded. Interferences due to reflections at structures in different depths result in a modulated spectra that can be used to reconstruct the axial structure of the sample. Experimentally, we achieve an axial resolution of 24 nm. In the XUV range, focusing with high numerical aperture (NA) is extremely expensive. Therefore, XCT uses low-NA optics, which limits the lateral resolution to the micrometer range. A combination of XCT with coherent diffraction imaging would provide improved lateral resolution. We present first results a proof-of-concept experiment at a synchrotron source.

Conference Presentation

Citation Download Citation

Martin Wünsche, Silvio Fuchs, Jan Nathanael, Johann J. Abel, Julius Reinhard, Felix Wiesner, Slawomir Skruszewicz, Christian Rödel, and Gerhard G. Paulus "XUV coherence tomography: a novel approach to nanoscale 3D imaging (Conference Presentation)", Proc. SPIE 11112, X-Ray Nanoimaging: Instruments and Methods IV, 111120U (9 September 2019); https://doi.org/10.1117/12.2528684

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
PRESENTATION

WATCH
PRESENTATION SAVE TO MY LIBRARY

GET CITATION

KEYWORDS

Extreme ultraviolet

Optical coherence tomography

Tomography

Coherence (optics)

Stereoscopy

Silicon

Light sources

Show All Keywords

Keywords/Phrases

Search In:

Publication Years