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In this study, we propose a spectral-domain optical coherence tomography (OCT) method that employs pulse irradiation to capture an interferogram and continuous wavelet transform (CWT) for data analysis. The pulse irradiation technique enables obtaining an interferogram with a high signal-to-noise ratio, and the CWT allows accurate analysis of a nonstationary signal. Experimental results obtained using a cover glass of thickness 150 μm confirmed that the repetitive measurement error was 0.32 μm. However, this error was reduced to 0.23 μm when pulse irradiation was applied for image capture.
Takamasa Suzuki,Bin Liu, andSamuel Choi
"3D thickness measurement using pulse-driven optical coherence tomography based on wavelet transform", Proc. SPIE 11102, Applied Optical Metrology III, 111021A (3 September 2019); https://doi.org/10.1117/12.2534005
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Takamasa Suzuki, Bin Liu, Samuel Choi, "3D thickness measurement using pulse-driven optical coherence tomography based on wavelet transform," Proc. SPIE 11102, Applied Optical Metrology III, 111021A (3 September 2019); https://doi.org/10.1117/12.2534005