High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy

Rong Su; Matthew Thomas; Mingyu Liu; Jeremy Coupland; Richard Leach

doi:10.1117/12.2528911

3 September 2019 High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy

Rong Su, Matthew Thomas, Mingyu Liu, Jeremy Coupland, Richard Leach

Author Affiliations +

Proceedings Volume 11102, Applied Optical Metrology III; 1110205 (2019) https://doi.org/10.1117/12.2528911
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

Surfaces featuring complex topographies, such as high slope angles, large curvatures and high aspect-ratio structures on both macro- and micro-scales, present significant challenges to optical measuring instruments. Here we demonstrate a method to characterise and correct the three-dimensional surface transfer function (3D STF) of a coherence scanning interferometer (CSI). Slope-dependent errors present in the original measurements are reduced after phase inversion of the 3D STF, and the final results agree with traceable contact stylus measurements within the 30 nm reproducibility of the stylus measurements. This method enables in-situ compensation for errors related to aberrations, defocus and diffraction.

Conference Presentation

Citation Download Citation

Rong Su, Matthew Thomas, Mingyu Liu, Jeremy Coupland, and Richard Leach "High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy", Proc. SPIE 11102, Applied Optical Metrology III, 1110205 (3 September 2019); https://doi.org/10.1117/12.2528911

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